TCCT etch、乾蝕刻機台原理、lam蝕刻ptt在PTT/mobile01評價與討論，在ptt社群跟網路上大家這樣說
TCCT etch關鍵字相關的推薦文章
TCCT etch在(11) 證書號數的討論與評價
TCCT MATCH CIRCUIT FOR PLASMA ETCH CHAMBERS. (57)摘要. 一種匹配電路,包括下列元件:一電力輸入電路,耦合至RF源;一內線圈輸入電路,耦合在.
TCCT etch在Etch - 電漿蝕刻產品的討論與評價
Atomic Layer Etch (ALE) Reactive Ion Etch. Lam Research的介電層蝕刻系統具備應用導向功能，可用來建構先進元件中的各種高難度結構。
TCCT etch在TCCT match circuit for plasma etch chambers - Google Patents的討論與評價
Disclosed is an apparatus used in etching semiconductor substrates and layers formed thereon during the manufacturer of semiconductor devices. The apparatus is ...
TCCT etch在ptt上的文章推薦目錄
TCCT etch在Study on Metrology of ERU Tuning in TCP ... - YMS Magazine的討論與評價
tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber was studied by the following.
TCCT etch在CN103780241A - 用于等离子体蚀刻腔室的tcct匹配电路 - Google的討論與評價
本发明涉及用于等离子体蚀刻腔室的TCCT匹配电路，具体而言，本发明公开了匹配电路，其包括以下部分：功率输入电路，其与RF源耦合；内线圈输入电路，其耦合在功率输入 ...
TCCT etch在TCCT match circuit for plasma etch chambers - ScienceON的討論與評價
A match circuit includes the following: a power input circuit coupled to an RF source; an inner coil input circuit coupled between the power input circuit ...
TCCT etch在Study on metrology of ERU tuning in TCP reactor, using PVx2 ...的討論與評價
The effect of the transformer-coupled capacitive tuning (TCCT) parameter on the etch rate uniformity (ERU) in a high density plasma etch chamber was studied ...
TCCT etch在New metrology for tuning the etch rate uniformity in plasma ...的討論與評價
For various typical etch chemistries and different settings of the TCCT parameter, the RF signals recorded by the PVx2 sensor wafers were ...
TCCT etch在TCCT Lam :: 軟體兄弟的討論與評價
TCCT Lam,本发明涉及用于等离子体蚀刻腔室的TCCT匹配电路，具体而言，本发明公开了. ... these structures are so tiny that etch processes are pushing the ...
TCCT etch在Transformer coupled capacitive tuning circuit with fast ...的討論與評價
A transformer coupled capacitive tuning (TCCT) circuit for an inductively coupled plasma (ICP) chamber includes a matching circuit including ...